Company Information

• Business Information FST Co., Ltd., established in 1987, is a specialized company that develops and manufactures pellicles for photomask protection in semiconductor and FPD processes, chillers and related equipment for temperature and humidity control, as well as defect inspection systems. The company’s main business areas include pellicles, chillers, and inspection equipment. Its flagship product, the pellicle, serves to protect photomasks from contaminants, while the chiller plays a key role in maintaining stable temperature conditions within semiconductor manufacturing facilities. FST’s major clients include Samsung Electronics, SK Hynix, LG Innotek, Micron, and Intel.

• Technology The Pellicle business A pellicle is a protective film that prevents contamination of the photomask during the exposure process while maintaining high transmittance at specific wavelengths. TCU Business The chiller provides high-precision temperature control during semiconductor and FPD manufacturing processes through various heat exchange systems. The scrubber is a device that treats and discharges various harmful exhaust gases generated from process equipment, ensuring they are within permissible limits according to environmental regulations APS business The APS Division provides precision process control, inspection, and measurement solutions required for product development and manufacturing processes, while continuously engaging in advanced R&D activities. We have successfully developed and manufactured infrastructure tools necessary for EUV processes in-house, and offer customization to meet the specific needs of our customers' process environments.